Microcantilevers for atomic force microscope data storage /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston, Mass. :
Kluwer Academic Publishers,
1999.
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| Series: | Microsystems ;
2. |
| Subjects: |
| Physical Description: | xxiv, 148 pages : illustrations ; 25 cm. |
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| ISBN: | 0792383583 (alk. paper) |