Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2005], ©2005.
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| Subjects: |
Hesburgh Library General Collection
| Call Number: |
QC 611.8 .S5 F48 2005
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