Fundamental principles of engineering nanometrology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Amsterdam ; Boston :
Elsevier/William Andrew,
[2010], ©2010.
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| Edition: | First edition. |
| Series: | Micro & nano technologies.
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| Subjects: |
| Physical Description: | xxvi, 321 pages : illustrations ; 24 cm. |
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| ISBN: | 9780080964546 (hbk.) 0080964540 (hbk.) |