The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements /

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Dettagli Bibliografici
Autore principale: Ehrstein, James R.
Ente Autore: National Institute of Standards and Technology (U.S.)
Altri autori: Croarkin, M. C. (Mary Carroll), 1934-
Format: Documento governativo Microfilm Libro
Lingua:inglese
Published: Gaithersburg, MD : Washington, DC : U.S. Department of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1999.
Edizione:1999 edition.
Serie:NIST special publication ; 260-131.
Standard reference materials.
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Collocazione: C 13.48/4: 260-131
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